The photo left shows a 308R with multi vacuum feed through collar and Ø 305 x 358 mm vacuum chamber. The modular design of the 308 family allows individual assembly, tailored to customer's specific requirements and needs. More details on request.
Evaporation
great variety of different evaporation methods: shuttle, heater coil or evaporation crucible
compact holder design for flexible adjustment of the evaporation sources
multiple-source-systems and variations with alternative evaporation sources are possible (e.g. combination of sputtering and e-beam-technology)
water cooled sources joined with high energy power supply enable the evaporation with various materials
Sputtering
large selection of coating materials
free positioning of sputter heads within the chamber by extremely compact sputter design
assembly of more than one sputter head as well as mixing of different coating technologies (e.g. evaporation / e-beam) possible
Mixed-Technology Coating
sophisticated chamber design enables the combination of different coating technologies (sputter, e-beam, PVD)
programmable turbo pump allows fast change from sputter- to evaporation-vacuum conditions
more than one sputter head and/or PVD-source can be used during one coating cycle
Thickness Control
accurate thickness monitoring via compact measurement head (optional MTM 20 thickness control monitor)
