The EO Scan SEM is equipped with an overhauled CamScan chamber and a brand new state of the art Tescan electron gun.

Key features of the EO SCAN

Unique 4-lens electron optical system (up to 30 kV), PC-controlled to easily switch between modes for high resolution imaging, ultra-low magnification, ultra-high depth of focus and optimised analysis

Effective automatic functions to control and optimise electron optical parameters, and/or to automate working procedures for fast high-quality results

Fast and easy 3D stereo imaging via PC-controlled beam deflection with optional 3D surface modelling and analysis

Sophisticated user interface, easy-to-use software for microscope control under MS Windows™

Password-protected, multi-level user accounts

Built-in remote operation and remote diagnostic

Comprehensive software for image archiving, measurement, processing, and analysis

Excellent analytical geometry for EDX, WDX, and EBSD analysis

Full range of detectors (i.e. BSE, LVSE, etc.), accessories and options

Full integration of analytical systems via
TCP/IP remote access
 
 

Windows™ is a trademark of the
Microsoft Corporation USA and other countries.

EO SCAN SEM Specifications

Chamber Type

XL-

Vacuum Type

H

U

 

Resolution

 

 

High Vaccum Mode

3.0 nm (2.0 for LaB6)

3.0 nm (2.0 for LaB6)

Low Vacuum Mode

 —

3.5 nm (2.5 for LaB6)

 

Vacuum

 

 

High Vacuum Mode

< 9*10-3 Pa

< 9*10-3 Pa

Low Vacuum Mode

 —

3 - 500 Pa (optionally 2000 Pa)

Working Modes

Resolution, Depth, Field, Wide Field, Rocking Beam

Magnification

2.5 to 1.000.000x

Detectors Standard

SE, Touch Alarm, Probe Current Measruement

SE, BSE, Touch Alarm, Probe Current Measruement

Detectors Optional

TE, EBIC, EBSD, EDX, WDX*, BSE, Chamberscope ...

TE, EBIC, EBSD, EDX, WDX*, LVSTD (to 500 Pa), Chamberscope ...

Accelerating Voltage

200 V to 30 kV

Electron Gun

Tungsten Heated Cathode or LaB6 Cathode

Probe Current

1 pA to 2 µA

Requirements

230 V / 50 Hz or 120 V / 60 Hz, 1300 VA, No Water Cooling