| | | |  | | | The EO Scan SEM is equipped with an overhauled CamScan chamber and a brand new state of the art Tescan electron gun. |
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| Key features of the EO SCAN | 
| Unique 4-lens electron optical system (up to 30 kV), PC-controlled to easily switch between modes for high resolution imaging, ultra-low magnification, ultra-high depth of focus and optimised analysis | 
| Effective automatic functions to control and optimise electron optical parameters, and/or to automate working procedures for fast high-quality results | 
| Fast and easy 3D stereo imaging via PC-controlled beam deflection with optional 3D surface modelling and analysis | 
| Sophisticated user interface, easy-to-use software for microscope control under MS Windows | 
| Password-protected, multi-level user accounts | 
| Built-in remote operation and remote diagnostic | 
| Comprehensive software for image archiving, measurement, processing, and analysis | 
| Excellent analytical geometry for EDX, WDX, and EBSD analysis | 
| Full range of detectors (i.e. BSE, LVSE, etc.), accessories and options | 
| Full integration of analytical systems via
TCP/IP remote access
Windows is a trademark of the Microsoft Corporation USA and other countries. | |
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| | | EO SCAN SEM Specifications | Chamber Type | XL- | Vacuum Type | H | U | | Resolution | | | High Vaccum Mode | 3.0 nm (2.0 for LaB6) | 3.0 nm (2.0 for LaB6) | Low Vacuum Mode | — | 3.5 nm (2.5 for LaB6) | | Vacuum | | | High Vacuum Mode | < 9*10-3 Pa | < 9*10-3 Pa | Low Vacuum Mode | — | 3 - 500 Pa (optionally 2000 Pa) | Working Modes | Resolution, Depth, Field, Wide Field, Rocking Beam | Magnification | 2.5 to 1.000.000x | Detectors Standard | SE, Touch Alarm, Probe Current Measruement | SE, BSE, Touch Alarm, Probe Current Measruement | Detectors Optional | TE, EBIC, EBSD, EDX, WDX*, BSE, Chamberscope ... | TE, EBIC, EBSD, EDX, WDX*, LVSTD (to 500 Pa), Chamberscope ... | Accelerating Voltage | 200 V to 30 kV | Electron Gun | Tungsten Heated Cathode or LaB6 Cathode | Probe Current | 1 pA to 2 µA | Requirements | 230 V / 50 Hz or 120 V / 60 Hz, 1300 VA, No Water Cooling |
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