The EO Scan SEM is equipped with an overhauled CamScan chamber and a brand new state of the art Tescan electron gun.
Key features of the EO SCAN
Unique 4-lens electron optical system (up to 30 kV), PC-controlled to easily switch between modes for high resolution imaging, ultra-low magnification, ultra-high depth of focus and optimised analysis
Effective automatic functions to control and optimise electron optical parameters, and/or to automate working procedures for fast high-quality results
Fast and easy 3D stereo imaging via PC-controlled beam deflection with optional 3D surface modelling and analysis
Sophisticated user interface, easy-to-use software for microscope control under MS Windows
Password-protected, multi-level user accounts
Built-in remote operation and remote diagnostic
Comprehensive software for image archiving, measurement, processing, and analysis
Excellent analytical geometry for EDX, WDX, and EBSD analysis
Full range of detectors (i.e. BSE etc.), accessories and options
Full integration of analytical systems via TCP/IP remote access
Windows is a trademark of the Microsoft Corporation USA and other countries.
EO SCAN SEM Specifications
< 9*10-3 Pa
Resolution, Depth, Field, Wide Field, Rocking Beam
4 to 1.000.000x, 4x in Wide Field Mode
SE, Touch Alarm, Probe Current Measruement
TE, EBIC, EBSD, EDX, WDX*, BSE, Chamberscope ...
200 V to 30 kV
Tungsten Heated Cathode or LaB6 Cathode
1 pA to 2 µA
230 V / 50 Hz or 120 V / 60 Hz, 1300 VA, No Water Cooling