VELA Focused Ion Beam W-REM
LYRA Focused Ion Beam FE-REM

LYRA & VELA

Detectors

XMH

XMU

SE

X

X

BSE

X

X

LVSTD

-

O

TE

O

O

CL

O

O

EBIC

O

O

EDX

O

O

EBSD*

O

O

X = standard, O = option, - = not available

* not with GIS-option