Typical Applications TEM Lamella Preparation / Lift-Out Local Cross-Sectioning, Thin Film Thickness Measurement Applications from Basic Research, Materials Science, Nanoprototyping etc. Micro- & Nano- Structuring / Testing / Probing /Tomography Inspection and failure analysis Forensic applications Vacuum System High Uni High Uni High Uni High Vacuum X X X X X X Low Vacuum — X — X — X W-Cathode X X — — — — LaB6-Cathode O O — — — — FE-Cathode — — X X X X XM-Chamber X X X X X X GM-Chamber X X X X X X (Gallium) Canion X X O O — — (AuSi) Canion C31X — — O O — — (Gallium) Cobra — — X X — — (Xenon) Plasma — — — — X X LVSTD Detector — O — O — O X = standard, O = option, - = not available VELA / LYRA / FERA Detectors / Chambers Combination XM GM SE X X BSE X X R-BSE O O (only Uni-Vac) LVSTD O O TE O O CL O O SITD O O EBIC O O EDX O O WDX O O EBSD O O TOF-SIMS — O AFM-STM — O X = standard, O = option, - = not available Now available with the new TESCAN GM multi chamber and three different FIB columns In early October 2011 TESCAN introduced the new FERA-XMH high resolution Schottky FE-SEM with a fully integrated PFIB plasma source Focused Ion Beam system.