Typical Applications
TEM Lamella Preparation / Lift-Out
Local Cross-Sectioning, Thin Film Thickness Measurement
Applications from Basic Research, Materials Science, Nanoprototyping etc.
Micro- & Nano- Structuring / Testing / Probing /Tomography
Inspection and failure analysis
Forensic applications
Vacuum System
High
Uni
High Vacuum
X
Low Vacuum
—
W-Cathode
LaB6-Cathode
O
FE-Cathode
XM-Chamber
GM-Chamber
(Gallium) Canion
(AuSi) Canion C31X
(Gallium) Cobra
(Xenon) Plasma
LVSTD Detector
X = standard, O = option, - = not available
VELA / LYRA / FERADetectors / Chambers
Combination
XM
GM
SE
BSE
R-BSE
(only Uni-Vac) LVSTD
TE
CL
SITD
EBIC
EDX
WDX
EBSD
TOF-SIMS
AFM-STM
Now available with the newTESCAN GM multi chamber and three different FIB columns
In early October 2011 TESCAN introduced the new FERA-XMH high resolution Schottky FE-SEM with a fully integrated PFIB plasma source Focused Ion Beam system.