Focused Ion Beam Microscopes (FIB-SEM)

TESCAN ORSAY HOLDING
LYRA Focused Ion Beam FE-REM
GAIA Focused Ion Beam UHR FE-REM
FERA Plasma Focused Ion Beam FE-SEM
XEIA Plasma Focused Ion Beam UHR FE-REM

LYRA

GAIA

FERA

XEIA

vacuum system

High

Uni

High

Uni

High

Uni

High

Uni

High Vacuum

X

X

X

X

X

X

X

X

Low Vacuum

X

X

X

X

FE Cathode

X

X

X

X

X

X

X

X

XM-Chamber

X

X

X

X

X

X

X

X

GM-Chamber

X

X

X

X

X

X

X

X

(Gallium) Canion

X

X

(Gallium) Cobra

O

O

X

X

(Xenon) Plasma

X

X

X

X

LVSTD Detektor

O

O

Beam Decel. Mode

O

O

O

O

O

O

O

O

X = standard, O = option, - = not available