Focused Ion Beam Equipped High Resolution Schottky FEG SEM with an Extra Large Chamber and Variable Pressure SEM Operation.
Availabel as HiVac (High Vacuum) or variable pressure UniVac (High and Low Vaccum).
High brightness Schottky field emitter for high resolution, high current, low noise imaging
Unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens for the beam aperture optimization
Variable pressure mode on UniVac model for observation of nonconductive specimens, allowing investigation of non-conductive specimens in their natural uncoated state.
Fast imaging rate using first class YAG detectors
Fully automated microscope set-up including electron optics set-up and alignment
Live stereoscopic imaging for accurate 3D navigation
Network operations and built-in remote access/diagnostics
Five-axis fully motorized compucentric stage with extra wide range of movements
FIB Specific Features
Unique ion optic column differentially pumped, with two ion pumps, for ultra-low ion scattering effect
Motorized aperture changer with ultra-high reproducibility
Beam Blanker and Faraday cup included as standard
Simultaneous SEM imaging with FIB etching or deposition
FIB control is fully integrated in the SEM software
Powerful toolbox for basic shapes creation with programmable process parameters
GIS Option Features
Ideal geometrical configuration with respect to SEM and FIB columns
5 independent gas reservoirs with capillaries
3-axis microstage with automatic nozzles positioning
Automated temperature control
Standard gases for GIS(other gasses on request):
Tungsten metal deposition
Platinum metal deposition
Insulator (SiOx) deposition
Enhanced etching of diamond and PMMA (H2O)
Enhanced or selective etching of Si, SiOx, Si3N4, W (XeF2)
