The SC26 FAST is a new version of our established SC24 field cancelling system that has been optimised to cancel the high frequency fields, typically at 9 kHz, from robotic wafer transports in 300 mm wafer fabs.
These fields limit the performance of electron beam tools in the fab and are a barrier to achieving the next semiconductor device CD node.
Where there are also bad DC fields, an SC26/DCMR sensor can be added to the system. The outputs from the AC and DC sensors are combined with a 25Hz crossover frequency in a small adapter box that plugs into the back of the control unit. When the DC sensor is added, the cancelling factor is increased at low frequencies. The cancelling factor at 9kHz is unchanged.