High Resolution Schottky FE-SEM

The most important features of the MIRA Series are:

 

High brightness Schottky emitter for
high-resolution / high-current / low-noise imaging.

 

Unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the Tescan proprietary Intermediate Lens for the beam aperture optimisation.

 

Real time In-Flight Beam Tracing™ for the performance and spot optimisation integrating the well established software Electron Optical Design.

 

Fast imaging rate.

 

High-throughput large-area automation, e.g. automated particle location and analyses.

 

Extraordinary analytical potential - up to 11 chamber ports with optimised analytical geometry allowing simultaneous EDX, WDX and EBSD.

 

Fully automated microscope set-up including electron optics set-up and alignment.

 

Sophisticated software for SEM control, image acquisition, archiving, processing and analysis.

 

Network operations and built-in remote access/diagnostics, all come as the Tescan standard.
 

LM

XM

Internal diameter

Ø 230 mm

300 x 330 mm

Door Width

148 mm

280 mm

Type

compucentric

compucentric

X

80 mm mot.

130 mm mot.

Y

60 mm mot.

130 mm mot.

Z

47mm mot.

100 mm mot.

Rotation

360° mot.

360° mot.

Tilt

-80 to +80° mot.

-30 to +90° mot.

 

Chamber type

LM-, XM-

Type

H

U

Resolution
High Vacuum Mode (In-Beam SE)



Low Vacuum Mode (LVSTD)

 
1 nm at 30 kV
1,2 nm at 15 kV
2 nm at 3 kV
3,5 nm at 1 kV
-

 
1 nm at 30 kV
1,2 nm at 15 kV
2 nm at 3 kV
3.5 nm at 1 kV
1,5 nm at 30 kV

Working Vacuum
High Vacuum Mode (chamber)
Low Vacuum Mode (chamber)

 
< 9 x 10-3 Pa
-

 
< 9 x 10-3 Pa
7 - 150 Pa

Electron Optics Woriking Mode

Resolution, Depth, Field, Wide Field, Rocking Beam

Magnification

3 to 1.000.000 x, 3 x in Wide Field Mode

Accelerating Voltage

200 V to 30 kV

Electron Gun

High Brightness Schottky Emitter

Probe Current

2 pA to 100 nA

Requirements

230 V / 50 Hz or 120 V / 60 Hz, 1300 VA,
No water cooling

Wide Field Optics™ and In-Flight Beam Tracing™ are trademarks of Tescan, a.s.
Windows™ is a trademark of the Microsoft Corporation USA and other countries.