High Resolution
Schottky FE-SEM
 

Availabele with various chambers, analysis systems, stages and other options to suit the customer’s needs.

Key features of the MIRA3 Generation

High brightness Schottky emitter for  high-resolution / high-current / low-noise imaging.

Unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the Tescan proprietary Intermediate Lens for the beam aperture optimisation.

Real time In-Flight Beam Tracing™ for the performance and spot optimisation integrating the well established software Electron Optical Design.

Fast imaging rate.

High-throughput large-area automation, e.g. automated particle location and analyses.

Extraordinary analytical potential - up to 20 chamber ports with optimised analytical geometry allowing simultaneous EDX, WDX and EBSD.

Fully automated microscope set-up including electron optics set-up and alignment.

Sophisticated software for SEM control, image acquisition, archiving, processing, analysis.

Network operations and built-in remote access/diagnostics, all as Tescan standard.
 

TESCAN MIRA LMTESCAN MIRA XMTESCAN MIRA GM

TESCAN MIRA Chamber Specifications

LM

XM

Internal Diameter

230 mm

290 x 340 mm (w,d)

Door Width

148 mm

290 x 322 mm (w,h)

Type

compucentric

compucentric

X

80 mm mot.

130 mm mot.

Y

60 mm mot.

130 mm mot.

Z

47mm mot.

100 mm mot.

Rotation

360 mot.

360 mot.

Tilt

-80 to +80 mot.

-30 to +90 mot.

Specimen Hight

81 mm max.

147 mm max.

MIRA SEMs also available with special GM multi-port chamber

 

TESCAN MIRA SEM Specifications

Chamber Type

LM- / XM- / GM-

Vacuum Type

H

U

* Resolution

High Vaccum Mode

1 nm at 30 kV
1.2 nm at 15 kV
2 nm at 3 kV
3.5 nm at 1 kV

1 nm at 30 kV
1.2 nm at 15 kV
2 nm at 3 kV
3.5 nm at 1 kV

Low Vacuum Mode

 —

1.5 nm at 30 kV

Vacuum

High Vacuum Mode

< 9*10-3 Pa

< 9*10-3 Pa

Low Vacuum Mode

 —

7 - 500 Pa

Working Modes

Resolution, Depth, Field, Wide Field, Channelling

Magnification

about 1.5 to 1,000,000x (depending on chamber)

Accelerating Voltage

200 V to 30 kV

Electron Gun

High Brightness Schottky Emitter

Probe Current

2 pA to 200 nA

Requirements

230 V / 50 Hz or 120 V / 60 Hz, 2200 VA, No Water Cooling

* Resolution for MIRA FE-SEM models with BDT (Beam Deceleration Technology) available on request.
 
Wide Field Optics™ and In-Flight Beam Tracing™ are trademarks of Tescan, a.s.
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