High brightness Schottky emitter for high-resolution / high-current / low-noise imaging.
Unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the Tescan proprietary Intermediate Lens for the beam aperture optimisation.
Real time In-Flight Beam Tracing™ for the performance and spot optimisation integrating the well established software Electron Optical Design.
Fast imaging rate.
High-throughput large-area automation, e.g. automated particle location and analyses.
Extraordinary analytical potential - up to 12 chamber ports with optimised analytical geometry allowing simultaneous EDX, WDX and EBSD.
Fully automated microscope set-up including electron optics set-up and alignment.
Sophisticated software for SEM control, image acquisition, archiving, processing, analysis.
Network operations and built-in remote access/diagnostics, all as Tescan standard.
Availabele with various chambers, analysis systems, stages and other options to suit the customer’s needs.
1 nm at 30 kV 1.2 nm at 15 kV 2 nm at 3 kV 3.5 nm at 1 kV
1 nm at 30 kV 1.2 nm at 15 kV 2 nm at 3 kV 3.5 nm at 1 kV
Low Vacuum Mode
—
1.5 nm at 30 kV
Vacuum
High Vacuum Mode
< 9*10-3 Pa
< 9*10-3 Pa
Low Vacuum Mode
—
7 - 150 Pa
Working Modes
Resolution, Depth, Field, Wide Field, Channelling
Magnification
about 2 to 1.000.000x (depending on chamber)
Accelerating Voltage
200 V to 30 kV
Electron Gun
High Brightness Schottky Emitter
Probe Current
1 pA to 100 nA
Requirements
230 V / 50 Hz or 120 V / 60 Hz, 1300 VA, No Water Cooling
Wide Field Optics™ and In-Flight Beam Tracing™ are trademarks of Tescan, a.s. Windows™ is a trademark of the Microsoft Corporation USA and other countries.
