High Resolution Schottky FE-SEM
Availabele with various chambers, analysis systems, stages and other options to suit the customer’s needs.
Key features of the MIRA3 Generation
High brightness Schottky emitter for high-resolution / high-current / low-noise imaging.
Unique three-lens Wide Field Optics design offering the variety of working and displaying modes embodying the Tescan proprietary Intermediate Lens for the beam aperture optimisation.
Real time In-Flight Beam Tracing for the performance and spot optimisation integrating the well established software Electron Optical Design.
Fast imaging rate.
High-throughput large-area automation, e.g. automated particle location and analyses.
Extraordinary analytical potential - up to 20 chamber ports with optimised analytical geometry allowing simultaneous EDX, WDX and EBSD.
Fully automated microscope set-up including electron optics set-up and alignment.
Sophisticated software for SEM control, image acquisition, archiving, processing, analysis.
Network operations and built-in remote access/diagnostics, all as Tescan standard.
TESCAN MIRA Chamber Specifications
Ø 230 mm
290 x 340 mm (w,d)
290 x 322 mm (w,h)
80 mm mot.
130 mm mot.
60 mm mot.
100 mm mot.
-80 to +80° mot.
-30 to +90° mot.
81 mm max.
147 mm max.
MIRA SEMs also available with special GM multi-port chamber
TESCAN MIRA SEM Specifications
LM- / XM- / GM-
High Vaccum Mode
1 nm at 30 kV1.2 nm at 15 kV2 nm at 3 kV3.5 nm at 1 kV
Low Vacuum Mode
1.5 nm at 30 kV
High Vacuum Mode
< 9*10-3 Pa
7 - 500 Pa
Resolution, Depth, Field, Wide Field, Channelling
about 1.5 to 1,000,000x (depending on chamber)
200 V to 30 kV
High Brightness Schottky Emitter
2 pA to 200 nA
230 V / 50 Hz or 120 V / 60 Hz, 2200 VA, No Water Cooling