TESCAN LYRA GMTESCAN VELA GMTESCAN FERA GM

20+ ports for innumerable applications

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GM

Int. Diameter

340 x 310 mm (w,d)

Door

340 x 320 mm (w,h)

Type

compucentric

X

130 mm mot.

Y

130 mm mot.

Z

100 mm mot.

Rotation

360° mot.

Tilt

-60 to +90° mot.

Specimen Height

139 mm max.

GM chamber

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The GM chamber is a newly designed chamber with more than 20 ports that can integrate a variety of different techniques. It is the first workstation in its class to fully realize the integration of a “Time of Flight” secondary ion mass spectrometer and in situ “SPM/AFM”, making the the TESCAN FIB-SEM with GM chamber one of the most versatile Nano-manipulation and characterization tools in the world.
 

These analytical applications can be fully realized in one single instrument

SPM/AFM (Scanning Probe Microscope- Atomic Force Microscope)

TOF (Time of Flight SIMS)

EBSD (Electron Backscattered Scanning Diffraction)

WDX (Wavelength Dispersive X-Ray Spectrometry)

EDX (Energy Dispersive X-Ray Spectrometry)

CL (Cathodoluminescence)

EBIC (Electron Beam Induced Current

 

Benefits for users

Multiple analytical techniques can be performed simultaneously from the same point of interest while milling through a sample with a Focused Ion Beam

Complementary information from several techniques can be realized on one single platform, enabling researchers to analyze nano-structures just after preparation or even during production

Critical in-situ measurements, in the same workstation, will benefit experiments where the sample cannot be exposed and whereby contamination and oxidation is not an option

One integrated instrument is efficient compared to two or more separate pieces of equipment (calculating e.g. the cost of ownership of multiple systems, throughput to providing results and surface cleanliness, taking into consideration transportation of samples between multiple instruments)

available for

VELA / LRYA / FERA