Based on VEGA XM

Robust transportable design

Active Vibration Isolation

Tablet PC with EasySEM touchscreen
 

High level system with several options

SE, BSE, LVSTD, Easy EDX and more
 

Advantage by design

Compact - no table etc.

Wheeled chassis for transport

Robust for industrial environment

Tablet PC mounted on frame
 

InduSEM Chamber

XM

Chamber

300 x 300 mm (w,d)

Door Width

280 mm

Type

compucentric

X

130 mm mot.

Y

130 mm mot.

Z

100 mm mot.

Rotation

360° mot.

Tilt

-30 to +90° mot.

Sample Hight

145 mm max.

Robust, versatile SEM
for any kind of samples.
Easily transportable for fast
on-site examination

EasySEM Software

TESCAN VEGA SEM Specifications

Vacuum Type

XMU

 

Resolution

 

High Vaccum Mode

3.0 nm

Low Vacuum Mode

3.5 nm

 

Vacuum

 

High Vacuum Mode

< 9*10-3 Pa

Low Vacuum Mode

3 - 500 Pa (Medium Vacuum: 3 - 150 Pa)

Working Modes

Resolution, Depth, Field, Wide Field, Channelling

Magnification

4 to 1.000.000x, 4x in Wide Field Mode

Detectors Standard

SE, BSE, Touch Alarm, Probe Current Measruement

Detectors Optional

TE, EBIC, EBSD, EDX, WDX*, LVSTD (to 500 Pa), Chamberscope ...

Accelerating Voltage

200 V to 30 kV

Electron Gun

Tungsten heated cathode

Probe Current

1 pA bis 2 µA

Requirements

230 V / 50 Hz or 120 V / 60 Hz, 1300 VA, No Water Cooling

Wide Field Optics™ and In-Flight Beam Tracing™ are trademarks of Tescan, a.s.
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