Based on VEGA XM
Robust transportable design
Active Vibration Isolation
Tablet PC with EasySEM touchscreen
High level system with several options
SE, BSE, LVSTD, Easy EDX and more
Advantage by design
Compact - no table etc.
Wheeled chassis for transport
Robust for industrial environment
Tablet PC mounted on frame
InduSEM Chamber
300 x 300 mm (w,d)
280 mm
compucentric
130 mm mot.
100 mm mot.
360° mot.
-30 to +90° mot.
145 mm max.
Robust, versatile SEMfor any kind of samples. Easily transportable for fast on-site examination
TESCAN VEGA SEM Specifications
Vacuum Type
XMU
Resolution
High Vaccum Mode
3.0 nm
Low Vacuum Mode
3.5 nm
Vacuum
High Vacuum Mode
< 9*10-3 Pa
3 - 500 Pa (Medium Vacuum: 3 - 150 Pa)
Working Modes
Resolution, Depth, Field, Wide Field, Channelling
Magnification
4 to 1.000.000x, 4x in Wide Field Mode
Detectors Standard
SE, BSE, Touch Alarm, Probe Current Measruement
Detectors Optional
TE, EBIC, EBSD, EDX, WDX*, LVSTD (to 500 Pa), Chamberscope ...
Accelerating Voltage
200 V to 30 kV
Electron Gun
Tungsten heated cathode
Probe Current
1 pA bis 2 µA
Requirements
230 V / 50 Hz or 120 V / 60 Hz, 1300 VA, No Water Cooling