Based on VEGA XM • Robust transportable design • Active Vibration Isolation • Tablet PC with EasySEM touchscreen High level system with several options • SE, BSE, LVSTD, Easy EDX and more Advantage by design • Compact - no table etc. • Wheeled chassis for transport • Robust for industrial environment • Tablet PC mounted on frame   XM Chamber Size 300x300 mm (W,D) Door Width 280 mm Type compucentric X 130 mm mot. Y 130 mm mot. Z 100 mm mot. Rotation 360° mot. Tilt -30 to +80° mot. Probe High 145 mm max. Robust, versatile SEM for any kind of samples. Easily transportable for fast on-site examination Type XMU Resolution High Vaccum Modus Low Vacuum Modus   3,0 nm 3,5 nm Vacuum High Vacuum Modus Low Vacuum Modus   < 9*10-3 Pa 3 - 500 Pa (optionally 2000 Pa) Working modes Resolution, Depth, Field, Wide Field, Rocking Beam Vergrößerung 3 to 1.000.000 x, 3 x in Wide Field Mode Detectors Standard Option   SE, RE TE, EBIC, EBSD, EDX, WDX, LVSTD (bis zu 500 Pa), Chamberscope ... Accelerating Voltage 200 V to 30 kV Electron gun Tungsten heated cathode Probe current 1 pA to 2 µA Installation requirements 230 V / 50 Hz or 120 V / 60 Hz, 1300 VA, No water cooling Wide Field Optics™ and In-Flight Beam Tracing™ are trademarks of Tescan, a.s. Windows™ is a trademark of the Microsoft Corporation USA and other countries.