Sample Preparation System Dual Ion Beam "DIB-Workstation" for high-quality site-specific sample preparation in SEM application   The today’s advanced SEM investigations require high-quality, artifact-free SEM samples of minimal amount of damage on their surface.   The new Technoorg SC-1000 SEM Sample Preparation System built on proven Technoorg Gentle Mill™ ion beam milling technique provides sample surfaces that totally meets these requirements.    Cross-sectional sample preparation by slope cutting  Final polishing and cleaning of traditional SEM and EBSD samples  High-energy ion gun for rapid milling  Low-energy ion gun for gentle surface polishing and cleaning  Automated parameter settings and operation  Sample rotation and oscillation  Site-specific sample preparation with high-precision positioning  Real-time monitoring of the milling process by high-resolution CCD camera   SC-1000 Dual Ion Beam Workstation Sample Holder Ion Beam Slope Cutting Final Polishing (EBSD, OIM etc.)   Description The Technoorg SC-1000 model is equipped both with high- and low-energy ion sources. Rapid slope cutting with the high-energy ion gun followed by gentle surface cleaning with the low-energy ion gun provides cross-sectional SEM samples, suitable for semiconductor failure analysis and other analytical purposes. The SC-1000 “DIB-Workstation” also provides an ion milling based solution for improving and cleaning of mechanically polished SEM samples and preparation of damage-free surfaces for EBSD technique.   specifications Low-Energy Ion Gun (Ultra-) High-Energy Ion Gun ion sources 100 eV - 2 keV continuously adjustable 2 keV - 10 keV* continuously adjustable (*optional Ultra: 2 keV - 20 keV) beam current density 10 mA/cm² max. 100 (150) mA/cm² max. beam current 7 - 80 µA 150 (250) µA beam diameter 750 - 1200 µm (FWHM) 300 - 600 (100 - 300) µm (FWHM) sputtering rate max. 28 μm/h (Si at 30°) 180 (600) μm/h (Si at 30° / 45°) sample holder slope cutting sample holder: 17 x 17 x 4 mm max. with 2 μm accuracy EBSD surface cleaning: Ø25 x 15 mm max. sample tilting 0° to 30° in 0.1° increments vacuum system oil-free diaphragm and turbomolecular pumps with combined (Pirani/Penning) vacuum gauge gas supply system Argon 5.0 (99.999%), high-precision working gas flow control with motorized needle valve imaging system high resolution CCD camera with manual zoom video lens of 50-400x magnification computer control easy-to-use graphical interface with optional image processing module automated ion source setup, milling parameter setting and operation control