The Tescan VEGA Series is a family of fully PC-controlled state-of-the-art SEM with a host of advanced features, combined with modern design, excellent quality of control electronics and mechanics at a very competitive price/performance ratio.   Unique 4-lens electron optical system (up to 30 kV), PC-controlled to easily switch between modes for high resolution imaging, ultra-low magnification, ultra-high depth of focus and optimised analysis   Effective automatic functions to control and optimise electron optical parameters, and/or to automate working procedures for fast high-quality results   Fast and easy 3D stereo imaging via PC-controlled beam deflection with optional 3D surface modelling and analysis   Sophisticated user interface, easy-to-use software for microscope control under MS Windows™ operating system   Password-protected, multi-level user accounts   Built-in remote operation and remote diagnostic   Comprehensive software for image archiving, measurement, processing, and analysis   Choice of different chambers and stages (SB-, LM or XM- type) with excellent analytical geometry for EDX, WDX, and EBSD analysis   Extra-long filament life-time   Variable pressure option (LV-/VP-systems with 500 or 2000 Pa)   Full range of detectors (i.e. BSE, LVSE, etc.), accessories and options   Full integration of analytical systems via TCP/IP remote access   SB LM XM Internal diameter Ø 160 mm Ø 230 mm 300x330 mm (B,T) Door width 120 mm 148 mm 280 mm Type eucentric compucentric compucentric X 45 mm mot. 80 mm mot.* 130 mm mot. Y 45 mm mot. 60 mm mot.* 130 mm mot. Z 27 mm man. 47mm mot. 100 mm mot. Z’ 6 mm man.     Rotation 360° mot. 360° mot. 360° mot. Tilt -90 to +90° man. -80 to +80° mot. -30 to +90° mot. Probe hight 36 mm max. 81 mm max. 145 mm max. * Also available with other measurements   Chamber type SB-, LM-, XM- Type H U Resolution High Vaccum Modus Low Vacuum Modus   3,0 nm -   3,0 nm 3,5 nm Vacuum High Vacuum Modus Low Vacuum Modus   < 9*10-3 Pa -   < 9*10-3 Pa 3 - 500 Pa (optionally 2000 Pa) Working modes Resolution, Depth, Field, Wide Field, Rocking Beam Magnification 4 to 1.000.000x, 4x in Wide Field Mode Detectors Standard Option   SE, Probe current measruement, Touch alarm,   TE, EBIC, EBSD, EDX, WDX*, BSE, Chamberscope ...   SE, BSE, Probe current measruement, Touch alarm, TE, EBIC, EBSD, EDX, WDX*, LVSTD (to 500 Pa), Chamberscope ...   Accelerating Voltage 200 V to 30 kV Electron gun Tungsten heated cathode or LaB6 cathode Probe current 1 pA bis 2 µA Installation requirements 230 V / 50 Hz or 120 V / 60 Hz, 1300 VA, No water cooling *WDX only with LM or XM Chamber   Windows™ is a trademark of the Microsoft Corporation USA and other countries.