FIB Specific Features |
| Unique ion optic column differentially pumped, with 2 ion pumps, for ultra-low ion scattering effect |
| Motorized aperture changer with ultra-high reproducibility |
| Beam Blanker and Faraday cup included as a standard |
| Simultaneous SEM imaging with FIB etching or deposition |
| FIB control is fully integrated in the SEM software |
| Powerful toolbox for basic shapes creation with programmable process parameters
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