A convenient tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron 25 De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber, eliminating contamination.
Imbedded Software
The XEI Evactron 25 can be run directly from the TESCAN software platform*.
This makes the cleaning process even more comfortable.
Contamination
The quality of images created in Electron Microscopes is often degraded by residual amounts of hydrocarbons present in the vacuum chamber. In additional to the electron column system, the sources of these problematic molecules can include the specimen mounts, holders or even the specimens themselves.
Cleaning
The XEI Evactron 25 De-Contaminator allows users to clean the chamber and samples, removing hydrocarbons by the proven downstream plasma ashing process. The Evactron System is not a “plasma cleaner” in the usual sense. Traditional plasma cleaning systems sputter etch with energetic ion species, possibly damaging sensitive sample surfaces with heat and ion bombardment.
The Evactron chemically etches surfaces using reactive gas radicals produced by the RF generated plasma. It preserves critical sample fine structure. The hydrocarbon contamination is broken down and easily removed by the system vacuum pump.
* depends on TESCAN software version!
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